UNIMO Technology UDR-204 Manuel d'instructions télécharger pdf (Page 131)

TappingMode AFM

Preparation Prior to Imaging

Rev. B MultiMode SPM Instruction Manual 111

Tuning cantilevers manually

The parameter values, especially the drive frequency and the sweep width, given in the following

example apply to one type of cantilever. The nominal parameter values may vary depending upon

the actual cantilever used.

For initial set-up, select View > Sweep > Cantilever Tune. The Sweep Controls panel should be

set to the values shown in the example below (see Figure 7.2f).

Figure 7.2f Sweep control panels for Graph Controls (left) and Main Controls (right).

1. Set parameters in the Sweep Controls panel as follows:

• Set the Drive frequency parameter to a value near the center of the range of the

resonance frequencies speciﬁed for the cantilever. For example, if the frequency range is

speciﬁed as 240—420kHz, select a drive frequency of 330kHz.

• Start with a Drive amplitude of about 300 mV. It is possible to detach the cantilever

from the substrate by applying too large of a drive amplitude; therefore, it is important

to exercise some caution when adjusting the Drive amplitude parameter. Note that the

Drive amplitude is set automatically during the engage process.

• Set the Sweep width to about the same value as the Drive Frequency, or at least some

value large enough to cover the frequency range speciﬁed for the wafer.

• Zero the Amplitude Setpoint. Note that the Amplitude Setpoint will be reset

automatically during the engage process.

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UNIMO Technology UDR-204 Manuel d'instructions Page 131